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October 15, 1994Journal of Applied Physics

Gettering of copper by bulk stacking faults and punched-out dislocations in Czochralski-grown silicon

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BSBo ShenTongji UniversityTSTakashi SekiguchiUniversity of TsukubaJJJ. JabłońskiRzeszów University

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Shen et al. (1994) studied this question.

synapsesocial.com/papers/6aa53d5daffc7bfe5364af39https://doi.org/10.1063/1.357285
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Synapse has enriched one closely related paper. Consider it for comparative context:

  1. 1Thermally Induced Defect Behavior and Effective Intrinsic Gettering Sink in Silicon Wafers1981 · 53 citations