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A high-accuracy cylindrical coordinate measuring instrument developed for the measurement of optical components is presented. It is equipped with an optical point sensor system including a high aperture probe. This setup allows measurements to be performed with high accuracy in a flexible way. Applications include the measurement of the topography of high-precision aspheric and freeform lenses and diffractive structures. High measuring speeds guarantee the implementation in a closed-loop production process.
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Andreas S. Beutler (2016) studied this question.
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