All-ion-implanted planar-gate current aperture vertical Ga2O3 MOSFETs with Mg-doped blocking layer, Wong, Man Hoi, Goto, Ken, Morikawa, Yoji, Kuramata, Akito, Yamakoshi, Shigenobu, Murakami, Hisashi, Kumagai, Yoshinao, Higashiwaki, Masataka
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Wong et al. (2018) studied this question.
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