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A direct measurement of atomic flux in e-beam evaporated yttrium has been demonstrated with a diode-laser-based atomic absorption (AA) monitor at 668 nm. Atomic number density and velocity were measured through absorption and Doppler shift measurements to provide the atomic flux. The AA-based deposition rates were compared with independent quartz crystal monitors showing agreement between the two methods.
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Wang et al. (1997) studied this question.
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