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December 23, 2002Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Highly sensitive plasma absorption probe for measuring low-density high-pressure plasmas

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Authors

KNKeiji NakamuraKyushu UniversityMOMasaki OhataUniversity of ShizuokaHSH. SugaiUniversity of Fukui

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Nakamura et al. (2002) studied this question.

synapsesocial.com/papers/6aa93b69891b7ede700c109chttps://doi.org/10.1116/1.1532740
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