Giant piezoelectric properties of BZT–0.5BCT thin films induced by nanodomain structure

Ba(Zr 0.2 Ti 0.8 )O 3 –0.5(Ba 0.7 Ca 0.3 )TiO 3 (BZT–0.5BCT) thin films were prepared from two ceramics targets, Ba(Zr 0.2 Ti 0.8 )O 3 and (Ba 0.7 Ca 0.3 )TiO 3 , using dual-magnetron sputtering, and a LaNiO 3 (LNO) seed layer was introduced between the film and Pt(111)/Ti/SiO 2 /Si substrates via a sol–gel technique.