The Evolvement of Lithography Optics Towards Advanced EUV Lithography: Enabling the Continuation of Moore’s Law for Six Decades

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Extreme ultraviolet (EUV) lithography is the state-of-the-art technology essential for printing critical layers of advanced integrated circuits, enabling the continuation of Moore's Law. Novelty: ClaimNovelty.SYNTHESIS. Consensus alignment: ConsensusAlignment.NEUTRAL.

Winfried Kaiser

doi:10.1109/med.2023.3343627

March 1, 2024IEEE Electron Devices Magazine

The Evolvement of Lithography Optics Towards Advanced EUV Lithography: Enabling the Continuation of Moore’s Law for Six Decades

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Abstract

EUV is currently the state-of-the-art lithography technology used to print the most critical layers of ICs, specifically of advanced logic and DRAM. It represents the highest achievement in the industry after decades of development of optical lithography.

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synapsesocial.com/papers/6aa9f00ff830d21e1935debe https://doi.org/10.1109/med.2023.3343627

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The Evolvement of Lithography Optics Towards Advanced EUV Lithography: Enabling the Continuation of Moore’s Law for Six Decades

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The Evolvement of Lithography Optics Towards Advanced EUV Lithography: Enabling the Continuation of Moore’s Law for Six Decades

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