A method of converting an oxide Y-Ba-Cu-O (YBCO) film from superconducting into insulating film is presented. With implanted Si ions, the film loses its electrical conductivity and diamagnetism while its crystalline structure is preserved. The process allows the growth of an epitaxial YBCO film on top of the inhibited area, thus providing an effective method of patterning high temperature superconducting multilayer structures.
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Y. et al. (1993) studied this question.
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