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Computer simulation of high resolution images is often necessary to determine the effects of different model structures on the image and to check that images show the correct behaviour with defocus. To calculate the image of a defect, periodic continuation must be used.1,2 The scattering from the defect is then sampled by a large number of beams and a slice method is optimal for calculating these Images. The multislice method has proven to be popular for these applications and the algorithm for generating the beam amplitudes at t + Δt is 3
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Peter Rez (1980) studied this question.
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