Summary: This work studied the possibility of thin PTFE‐like film deposition, from a supersonic jet of PTFE decomposition products down to the monomer state. One of the most important features of gas‐jet deposition is the use of a monomer gas as a precursor with its polymerization on a surface. Under certain conditions, partial polymerization is possible in an adiabatically expanding supersonic jet. Another important feature of this method is the unique possibility of controlling the deposition process by changing parameters of the gas flow and the state of the substrate. Structure of a PTFE‐like film obtained from a He‐C2F4 jet. magnified image Structure of a PTFE‐like film obtained from a He‐C2F4 jet.
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Rebrov et al. (2005) studied this question.
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