The charge transport mechanism in amorphous Al2O3 was examined both experimentally and theoretically. We have found that electrons are dominant charge carriers in Al2O3. A satisfactory agreement between the experimental and calculated data was obtained assuming the multiphonon ionization mechanism for deep traps in Al2O3. For the thermal and optical trap ionization energies in Al2O3, the values WT=1.5 eV and Wopt=3.0 eV were obtained.
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Novikov et al. (2009) studied this question.
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