In this letter, we present the first prototype of aluminum nitride two-dimensional-mode resonators (2DMRs) for operation in the ultra-high-frequency range. The 2DMRs in this letter are made of thick AlN films (5.9μm) and rely on both the d31and the d33coefficients of AlN to attain high electromechanical coupling (kt2), low motional resistance, and a limited lithographic control of the resonance frequency. kt2> 3.4%, a mechanical quality factor larger than 2400, and >10% lithographic variation of the center frequency were demonstrated.
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Cassella et al. (2015) studied this question.
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