A double cantilever beam MEMS switch has been developed for wireless applications. The two beams are controlled by a single actuation electrode. This switch has low pull-in voltage of 15 V and fast switching speed of 60 µs. An RF performance with >−50 dB isolation below 5 GHz and <−0.18 dB up to 30 GHz was observed.
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Lee et al. (2003) studied this question.
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