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May 1, 1991Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Silicon nitride formation from a silane–nitrogen electron cyclotron resonance plasma

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Authors

JBJ. C. BarbourSandia National LaboratoriesHSH. J. SteinLMU KlinikumOPOleg A. PopovMoscow Power Engineering Institute

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Cite This Study

Barbour et al. (1991) studied this question.

synapsesocial.com/papers/6aaf45ca6414e7790939910ahttps://doi.org/10.1116/1.577392
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