The cryogenic operation of partially depleted silicon-on-insulator inverters

This paper describes the cryogenic operation of inverters fabricated in a partially depleted (PD) 1 /spl mu/m Silicon-on-Insulator (SOI) CMOS technology. As is shown, the floating-body effects like the kink effect degrade the static transfer characteristics considerably. Generally, the effects aggravate upon cooling. Additionally, at deep cryogenic temperatures, e.g., 4.2 K, typical low-temperature anomalies, which are related to the device freeze-out, cause hysteresis effects. Ways for improvement are discussed and compared: As is shown, the PD SOT inverter anomalies can be largely reduced by using the so-called twin-gate configuration.>