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June 25, 2010IEEE Transactions on Electron Devices

Loss Measurement of Aluminum Thin-Film Coplanar Waveguide (CPW) Lines at Microwave Frequencies

Maliheh Ramazani Haddad Miladi Mahmoud Shahabadi S. Mohajerzadeh

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Abstract

To investigate coplanar waveguide (CPW) attenuation in monolithic microwave integrated circuits, measurements are carried out within 15-26 GHz on several CPW resonators with different metal thicknesses ranging from 200 to 2300 nm. In these experiments, the thin metal layers are made of aluminum. We will present a method for extracting the quality factor from the measured S-parameters of the CPW resonators.

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Cite This Study

Ramazani et al. (2010) studied this question.

synapsesocial.com/papers/6ab20a33a9ea7cbecff92eb0 https://doi.org/10.1109/ted.2010.2050110

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