⌘+K

Pulse Explore Communities Researchers Journals

Home Communities Explore

January 1, 2006Journal of The Electrochemical Society

Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP

Edward E. Remsen Sriram Anjur David Boldridge Mungai Kamiti Shoutian Li T. Johns C. D. Dowell Jaishankar Kasthurirangan Paul Feeney

View at Publisher

Ask AI

Bookmark

Share

Abstract

Analysis of Large Particle Count in Fumed Silica Slurries and Its Correlation with Scratch Defects Generated by CMP, Remsen, Edward E., Anjur, Sriram, Boldridge, David, Kamiti, Mungai, Li, Shoutian, Johns, Timothy, Dowell, Charles, Kasthurirangan, Jaishankar, Feeney, Paul

Discussion

No takes yet. Share an insight, caveat, or question.

Cite This Study

Remsen et al. (2006) studied this question.

synapsesocial.com/papers/6ab20dffbb6d910fe287bf68 https://doi.org/10.1149/1.2184036

View at Publisher

Ask AI

Bookmark

Share

Keep reading

Synapse has enriched 5 related papers. Consider them for comparative context:

1Effect of Particle Size of Chemical Mechanical Polishing Slurries for Enhanced Polishing with Minimal DefectsOriginal Research · 2000 · 201 citations
2CALIBRATION OF SPHERICAL PARTICLES BY LIGHT SCATTERING USING PHOTON CORRELATION SPECTROSCOPYOriginal Research · 1989 · 9 citations
3Influence of Particle Refractive Index on the Lower Detection Limit of Light Scattering Aerosol CountersOriginal Research · 1996 · 19 citations
4High-Frequency Pulse-Assisted Micro-Jet Electrochemical Deposition of Copper for High-Performance Interconnect Structures: Grain Refinement, Enhanced Mechanical Strength, and Corrosion ResistanceJournal of The Electrochemical Society · 2026
5Kinetic Transitions and Irreversible Changes in OCV Hysteresis of LiFePO4 Batteries under Cold ExposureJournal of The Electrochemical Society · 2026

Harnessing Interhalogen and Polyinterhalogen Compounds: Novel Strategies for Advancing Halogen Battery PerformanceJournal of The Electrochemical Society · 2026
Dependence of Sand’s Time on Current Density: Importance of Limiting CurrentJournal of The Electrochemical Society · 2026
Koopman-Based Capacity Prediction for Health Assessment of Lithium-Ion BatteriesJournal of The Electrochemical Society · 2026
Extending a Thermal Runaway Modeling Framework to Cells of Different Formats, Sizes, and ChemistriesJournal of The Electrochemical Society · 2026
Study on the Preparation of Si/C Composite Materials with Mixed Structures by Open Mill Method and Their Lithium Storage PerformanceJournal of The Electrochemical Society · 2026

More from Journal of The Electrochemical Society

More from Cabot Microelectronics (United States)