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Optimized dual temperature pulsed laser deposition of TiO2 to realize MTOS (metal-TiO2–SiO2–Si) capacitors with ultrathin gate dielectric, Singh, Ravneet, Paily, Roy, DasGupta, Amitava, DasGupta, Nandita, Misra, Pankaj, Kukreja, Lalit M
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Singh et al. (2004) studied this question.
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