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November 1, 1997Pure and Applied Optics Journal of the European Optical Society Part AOpen Access

Fabrication and characterization of microlenses realized by a modified LIGA process

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PRPatrick RutherUniversity of FreiburgBGBarbara GerlachJGJ. GöttertHochschule Niederrhein

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Ruther et al. (1997) studied this question.

synapsesocial.com/papers/6ab35cffeceddf3186f387dahttps://doi.org/10.1088/0963-9659/6/6/006
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