Ferroelectric Pb(Zr,Ti)O3 films have been deposited by spin-coating techniques, applying a modified sol-gel process. The growth of the thin films as a function of processing has been investigated by structural analyses using XRD, XRF, SEM and TEM methods. The data are the basis for the discussion of the ferroelectric properties of the layers.
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Klee et al. (1994) studied this question.
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