We produced BaTiO3 films by radio frequency sputtering. We observed hysteresis loops and a dielectric anomaly with these films. From x-ray diffractometer and scanning electron microscope studies we are certain that Barium Titanate films have been produced. Nevertheless, some results obtained cannot be explained by the ferroelectric properties alone. The influence of semiconductor effects and electrode materials are also discussed.
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Schäfer et al. (1978) studied this question.
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