The production of truly ferroelectric films seems to be difficult. But the feasibility is shown. In order to make thin films of BaTiO3, the rf-sputtering have been chosen using BaTiO3-ceramics as target material. X-ray studies of the films as well as microprobe analysis give equivalent results with BaTiO3 ceramics. That means we have produced films showing hysteresis loops and a pronounced maximum in the dielectric constant.
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Schäfer et al. (1978) studied this question.
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