Structural and Electrical Characteristics of HfO2 Films Fabricated by Pulsed Laser Deposition, Ikeda, Hiroya, Goto, Satoru, Honda, Kazutaka, Sakashita, Mitsuo, Sakai, Akira, Zaima, Shigeaki, Yasuda, Yukio
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Ikeda et al. (2002) studied this question.