Some New Applications of the Scanning Electron Acoustic Microscope for Materials Evaluation

Several different kinds of materials were investigated by an improved scanning electron acoustic microscope (SEAM). Residual stress distribution in aluminum metal and whisker-reinforced Al2O3–SiCw ceramic induced by Vicker's indentation, domain structures in a ferroelectric Bi4Ti3O12 single crystal, dislocations and defects in the hetero-structure GaAs/GaAlAs epitaxial multilayer were successfully observed. Alternative contrast mechanisms were discussed. The advantages of the scanning electron acoustic microscope for materials evaluation were demonstrated.