Correlative target preparation of TEM-compatible halfgrids for atom probe tomography

This study presents a streamlined workflow for targeted, correlative atom probe tomography (APT) sample preparation using femtosecond laser-fabricated halfgrids compatible with standard transmission electron microscope (TEM) holders. Two complementary approaches enable both in-plane and out-of-plane feature selection, demonstrated on an additively manufactured Mo–0.2 wt% C–0.2 wt% Zr alloy. The workflow integrates scanning electron microscopy, electron backscatter diffraction, focussed ion beam milling, transmission Kikuchi diffraction, or TEM for site-specific preparation and verification of features in the final APT tips. Multiple regions of interest can be prepared from a single halfgrid, providing a versatile platform for correlative, multiscale materials characterisation.