X-Ray Detectors Based on Amorphous InGaZnO Thin Films

This is the authors' abstract. We don't add key points for this paper.

Indium–gallium–zinc oxide (IGZO) photodetectors have been mostly studied in the ultraviolet region and rarely in the X-ray region. This study fabricates IGZO X-ray detectors on glass substrates using different post-deposition annealing (PDA) times. The photo-to-dark current ratio increases significantly from 2.6 to 392.3 after PDA because of a considerable reduction of the deep-level states. There are fewer residual electrons in the conduction band and recombination centers in the middle of the bandgap are eliminated. An IGZO X-ray detector with optimal PDA time has a sensitivity of8.5× 10^-3\,\,μ C/(mGy·cm^2)and a rise/decay time of 5.1/12.2 s with a bias of 10 V at a dose rate of 100 mGy/s. This result shows that IGZO is eminently suited to applications for X-ray detection.