Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation

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A length extensional mode lead zirconate titanate (PZT)-on-Si resonator is presented using 50 Ω termination with high-stopband rejection exploiting feed-through cancellation. A 250-nm-thick (100)-dominant oriented PZT thin-film deposited on top of 3 μm Si using pulsed laser deposition has been used. The resonator is presented with the length of 40 μm (half-wavelength), which corresponds to a resonance frequency of about 83 MHz. The effect of feed-through cancellation has been studied to obtain high-stopband rejection using bottom electrode patterning in the presence of a specific grounding resistance. Using this technique, the stopband rejection can be improved by more than 20 dB.