A multisensor microsystem for general lung diagnostics is presented. The microsystem measures peak expiratory flow, temperature, pressure, and relative humidity. Solid-state technology provides an integrated multisensor solution applying silicon MEMS technology. Prototypes implemented on two silicon chips show promising results in their application to flow measurement in a healthy volunteer. Calibration issues are briefly discussed.
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Putten et al. (2002) studied this question.
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