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Impact of Barrier Metal Sputtering on Physical and Chemical Damages in Low-k SiOCH Films with Various Hydrocarbon Content, Inoue, Naoya, Furutake, Naoya, Ito, Fuminori, Yamamoto, Hironori, Takeuchi, Tsuneo, Hayashi, Yoshihiro
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Inoue et al. (2008) studied this question.
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