A Three-Stage Voltage Adjustment Method for Correcting the Inconsistent Action of the Inchworm Piezoelectric Structure

The macro stage of the tea-coffee nanoscale detection device adopts an inchworm piezoelectric structure. However, this structure has the phenomenon of inconsistent action, affecting the motion accuracy. To study this phenomenon, the causes of actuation errors were first analyzed, including material dispersion, hysteresis asymmetry, and contact timing differences. Based on this, a three-level voltage adjustment method was then proposed. This method sequentially performs three steps of correction: actuation capability balance, shear hysteresis compensation, and lateral consistency alignment. It systematically improves the consistency of the inchworm piezoelectric structure’s action. Experimental results show that the three-level voltage adjustment method increases the single-step displacement consistency of the actuator by approximately 28.72%, and also significantly improves the stability of the overall movement.