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September 10, 2025Journal of Physics Conference SeriesOpen Access

Laser direct writing and doping of single-crystal silicon using liquid silanes

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Authors

XYXiaoyan YangPCPeng ChenZLZi‐Kui Liu

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Overview

This research demonstrates enhanced silicon growth and efficient doping in microelectronics using liquid silanes.

Key Points

  • Successful laser direct writing of monocrystalline silicon was achieved using high-order liquid silanes.
  • High-order liquid silane cyclohexasilane significantly improves growth rate and reduces energy thresholds.
  • In-situ doping of silicon was effectively carried out using CHS and dissolved white phosphorus.
  • This method simplifies the doping process while avoiding toxic sources, enhancing semiconductor manufacturing.

Cite This Study

Yang et al. (2025) studied this question.

synapsesocial.com/papers/68c1955c9b7b07f3a061923ehttps://doi.org/10.1088/1742-6596/3093/1/012009
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