What question did this study set out to answer?

To characterize the microstructural evolution and local amorphization within single-crystal silicon during nanosecond pulsed laser direct writing for optical waveguide fabrication.

November 27, 2023Advanced Engineering MaterialsOpen Access

Transmission Electron Microscopy Characterizations of Local Amorphization of Single Crystal Silicon by Nanosecond Pulsed Laser Direct Writing

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Authors

LTLanh TrinhUniversity of Nebraska–Lincoln XWXinya WangShanghai University XZXiang ZhangCentral South University of Forestry and Technology

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Implication

Experimental study reveals core-shell amorphous silicon structures in single-crystal silicon, indicating parameters for laser-written optical waveguides.

Key Points

To characterize the microstructural evolution and local amorphization within single-crystal silicon during nanosecond pulsed laser direct writing for optical waveguide fabrication.
Fabricated localized structures in single-crystal silicon using in-volume nanosecond pulsed laser direct writing at varying scanning speeds.
Analyzed structural transformations and phase distribution using transmission electron microscopy (TEM), high-resolution TEM (HRTEM), and selected area electron diffraction (SAED).
TEM, SAED, and HRTEM imaging identified core-shell microstructures consisting of an amorphous silicon core encapsulated by a crystalline silicon shell.
Decreasing laser scanning speed produced a higher density of crystal defects while generating a lower volume of amorphous silicon.

Cite This Study

Trinh et al. (2023) studied this question.

synapsesocial.com/papers/6a6f85b2ce524a4339c371a2 https://doi.org/10.1002/adem.202301377

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Implication

Experimental study reveals core-shell amorphous silicon structures in single-crystal silicon, indicating parameters for laser-written optical waveguides.

Transmission Electron Microscopy Characterizations of Local Amorphization of Single Crystal Silicon by Nanosecond Pulsed Laser Direct Writing

Discussion

Member takes

Implication

Key Points

Cite This Study

Transmission Electron Microscopy Characterizations of Local Amorphization of Single Crystal Silicon by Nanosecond Pulsed Laser Direct Writing

Discussion

Member takes

Implication

Key Points

Cite This Study

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