LIGA technique enables high aspect ratio microactuators in microsystem technology, suggesting wide application potential.
The LIGA technique with its ability of free lateral shaping, the large structural height of several hundred micrometers, the high aspect ratio of up to 100, and the wide choice in materials such as plastics, metals, and ceramics seems to be particularly suitable for the fabrication of microactuators. The possibility to build up LIGA structures on top of processed silicon wafers extends the microsystem technology to many new applications.
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Wolfgang Menz (1992) studied this question.
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