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This is a Experimental Study study.

September 19, 2025

Ultra-high-Q photonic integrated chips on 8-inch dispersion-engineered Si3N4-SiO2-Si wafer

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Experimental results show high-quality microring resonators with a quality factor above 25.1 million, indicating advanced photonic chip technology.

Achieving an intrinsic quality factor exceeding 25.1 million indicates exceptional performance in photonic devices.
The combination of amorphous silicon hardmask etching and dispersion-engineered wafers presents a new solution for photonic applications.
The propagation loss measured at 1.6 dB/m provides insight into the efficiency of the microring resonators.
The successful fabrication of 8-inch crack-free wafers supports scalability for industrial photonics.

Liu et al. (2025) studied this question.

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Experimental results show high-quality microring resonators with a quality factor above 25.1 million, indicating advanced photonic chip technology.