A simultaneous measurement method of 3D small Angle laser based on PZT feedback compensation is proposed. A single right Angle prism is used as the 3D Angle sensor, and the collimated laser beam is incident on the beam-splitting film coated beam-splitting surface. The 3D Angle change of the moving platform where the sensitive element is located is calculated by the position change of the two beams of light on the photoelectric position sensitive detector after beam-splitting. The reflected beam is used to measure the tilt and pitch Angle. The beam reentering through the prism after transmission is used to measure the rolling Angle. To solve the problem of limited moving distance of the platform to be measured and the influence of light drift caused by pitch Angle crosstalk in rolling Angle measurement, a PZT piezoelectric ceramic feedback compensation unit is introduced to ensure that the measuring beam is always located in the central sensitive region of the position sensitive detector, improve the stability and measurement accuracy of the system, and realize high-precision real-time measurement of the rolling Angle of the platform to be measured with a larger moving distance. The feasibility of the scheme is verified by theoretical analysis and experiment. This method has the advantages of simple structure of sensitive unit, strong anti-interference ability, high precision, low cost and small size.
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Wang et al. (2024) studied this question.
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