Seen as vectors for reducing energy consumption, power electronic components for wide-bandgap semiconductors (SiC, GaN…) play a strategic role in the electric mobility and power conversion sector. The proposed paper will present the results of a collaboration between IBS and CAMECA illustrating the effect of different implantation conditions (energy, angle, dose, temperature) on the in-depth distribution of implanted species.
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Créon et al. (2024) studied this question.
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