High speed 2D material visualization by using a microscopic dynamic spectroscopic imaging ellipsometer

This paper describes the lateral resolution enhancement of dynamic spectroscopic imaging ellipsometer, aiming to improve its inspection capabilities. Traditional imaging ellipsometers use a rotating optical elements type scheme which typically requires longer acquisition time. Moreover, for spectroscopic applications, an extra spectral scanning mechanism is needed. The proposed system based on a one-piece polarizing interferometric module, can efficiently extract spatio-spectral ellipsometric phase maps of two-dimensional (2D) materials with a spatial resolution of a few microns at a speed of hundreds of Hz.