Modifying single-crystal silicon and trimming silicon microring devices by femtosecond laser irradiation

Also Consider

Synapse has enriched 5 closely related papers on similar clinical questions. Consider them for comparative context:

1. 1Femtosecond laser modification of LPCVD-SiN photonic devices: microstructural evolution and post-fabrication trimming2026
2. 2Femtosecond laser modification of amorphous silicon films for photovoltaic and polarization optics applications2025
3. 3Amorphization and Ablation of Crystalline Silicon Using Ultrafast Lasers: Dependencies on the Pulse Duration and Irradiation Wavelength2024 · 25 citations
4. 4Controllable Si micro-structuring by temporally modulated single-shot femtosecond pulse lithography2024 · 4 citations
5. 5Surface machinability enhancement of 4H-SiC wafer by ultrafast laser: Phase transformation and microstructural evolution2026 · 2 citations