High Q-Factor and Mode-Matching Disk Ring Gyroscope Using (100) Single Crystal Silicon

In this paper, a novel disk ring gyroscope (DRG) was proposed to compensate the anisoelasticity of (100) single crystal silicon (SCS), which can achieve the mode-matching and high Q-factor simultaneously. The proposed DRG consists of two substructure with 4 connection spokes (4-spokes DRG) and an inner nested 8-spokes substructure (8-spokes DRG). After parameter optimization, a frequency split as small as 18 ppm is achieved by the finite element analysis (FEA). The Q-factor of DRG related to thermoelastic damping (Q <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">TED</inf> ) reaches 1.36 million. The experimental result showed the frequency split was reduced from over 30,000 ppm to 2015 ppm, which shows a promising DRG design for high performance gyroscope.