In this work, a novel, silicon-based micro-electromechanical valve that includes a submicrometric orifice and can operate at pressure gradients of 1 bar was used to enhance sampling for gas chromatograph mass spectrometers. The valve is based on a membrane-in-membrane design and operates with thermomechanical actuation. It includes a pin to enable self-cleaning. Prototypes were fabricated and preliminary testing was performed.
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Bagolini et al. (2024) studied this question.
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