Optical coherence tomography imaging by a fully integrated MOEMS endomicroscopy probe with Mirau micro-interferometer and two-axis electrothermal micro-scanner using Lissajous trajectory scanning

This report presents the results of a study focused on the development of an integrated probe intended for endomicroscopic application. A new type of transverse scanning probe is described, which was built using Mirau micro-interferometer fabricated in MOEMS (Micro-Opto-Electro-Mechanical Systems) technology; and a 2-axis electrothermal actuator fabricated in MEMS (Micro-Electro-Mechanical Systems) technology, connected with a GRIN lens collimator and single mode fiber. Herein we present a numerical analysis and an optimization of endomicroscopic probe-scanning properties, based on Lissajous curves. The key part of the report is 2D- and 3D-imaging of phantom structures, based on polymer material and USAF-target pattern visualized with an endomicroscopy probe. The imaging was obtained by the Swept Source Optical Coherence Tomography technique (SS-OCT), working at a central wavelength λ c = 1060 nm, a swept range Δλ = 100 nm, an A-scan rate f a = 200 kHz, and the scanning of samples with the use of Lissajous curves.