High-performance a-Ga2O3 solar-blind photodetectors by pulsed magnetron sputtering deposition

Solar-blind photodetectors (SBPDs) based on the ultrawide-bandgap semiconductor Ga2O3 have gained attention due to their potential applications in both military and civilian domains. As technology advances, photodetectors are being improved to achieve better energy efficiency, smaller size, and better performance. Solar-blind photodetectors based on a metal-semiconductor-metal structure of amorphous gallium oxide (a-Ga2O3) films were fabricated by pulsed magnetron sputtering deposition (PSD). The photodetector based on amorphous gallium oxide has a responsivity of 71.52 A/W, a fast rising and falling response time of less than 200 ms, a photo-to-dark current ratio (PDCR) of 6.52 × 104, and an external quantum efficiency of 34 526.62%. PSD-prepared gallium oxide SBPDs demonstrate a cost-effective room temperature method for growing gallium oxide and show the advantages of growing gallium oxide.