The capabilities and limitations of open source software for TCAD simulation are considered. Analysis showed that the Suprem4-GS program and the ViennaPS library are available for two-dimensional technological modeling. There is a choice of programs for device modeling. For full TCAD package the set of Suprem4-GS – Picses2B – PostMini is available. However, the possibilities of using Suprem4-GS and Pisces2B are limited due to the unavailability of old compilers and libraries.
Aleksey Klyuchnikov (Wed,) studied this question.