Analyzes the local structure of Si-C alloys, revealing chemical order in the bonding arrangement.
The local structure of hydrogenated amorphous Si-C alloy films, a-Si_1-x C_x:H, has been studied by measuring the extended X-ray absorption fine structure at the Si K edge. The first-coordination-shell average bond lengths are found to be 2.35 A for Si-Si and 1.86 A for Si-C and are constant with concentration to within ±0.015 A. By comparing the composition of the first coordination shell around silicon with the average concentration, it is shown that the alloy tends to be chemically ordered, in that heteroatomic bonds are preferred.
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F. et al. (1992) studied this question.
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