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Examines the short range order in a-Si1-xCx:H, revealing chemical ordering in the alloy phase.
We present a comprehensive study of short range order in a-Si_1-xCx:H using X-ray scattering and Si K-edge EXAFS. The X-ray scattering probes the total radial distribution function; by detailed fitting in R-space we measure short range order parameters around C and Si for the first and second shell. The C-C distances in first and second shell indicate that both carbidic and graphitic configurations are present. The coordination numbers indicate that there is a tendency to chemical order; at high C concentrations there is evidence for chemical order with phase separation. The EXAFS measurements probe local order in the Si-C alloy phase; there is clear evidence that even this phase is chemically ordered.
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F. et al. (1992) studied this question.
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