What question did this study set out to answer?

To assess whether scanning electron microscopy equipped with silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS) can deliver quantitative accuracy and precision equivalent to wavelength-dispersive spectrometry.

November 11, 2014Journal of Materials ScienceOpen Access

Performing elemental microanalysis with high accuracy and high precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS)

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Authors

DNDale E. NewburyNational Institute of Standards and Technology NRNicholas W. M. RitchieNational Institute of Standards and Technology

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Implication

Experimental study demonstrates high-precision elemental microanalysis using silicon drift detector energy-dispersive spectrometry, indicating performance comparable to wavelength-dispersive systems.

Key Points

To assess whether scanning electron microscopy equipped with silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS) can deliver quantitative accuracy and precision equivalent to wavelength-dispersive spectrometry.
Acquired high-count X-ray spectra using an SDD-EDS system operating within a scanning electron microscope.
Applied peak-fitting algorithms to resolve severe spectral overlaps, quantify high-contrast concentration ratios, and measure low atomic number elements (C, N, O, F).
Recovered characteristic peak intensities in severe spectral overlap regimes, including PbS, MoS2, BaTiO3, SrWO4, and WSi2, matching the accuracy of wavelength-dispersive systems.
Accurately quantified high-contrast elemental ratios (Ba at 0.4299 vs. Ti at 0.0180; Ba at 0.2194 vs. Ce at 0.00407; Si at 0.1145 vs. Ta at 0.0041 mass fraction) and light elements (C, N, O, F).
Achieved trace detection limits below 0.001 mass fraction (<1000 ppm) with an acquisition time of 500 seconds.

Cite This Study

Newbury et al. (2014) studied this question.

synapsesocial.com/papers/69d76536f44a16d01ef30cb0 https://doi.org/10.1007/s10853-014-8685-2

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Implication

Experimental study demonstrates high-precision elemental microanalysis using silicon drift detector energy-dispersive spectrometry, indicating performance comparable to wavelength-dispersive systems.

Performing elemental microanalysis with high accuracy and high precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS)

Discussion

Member takes

Implication

Key Points

Cite This Study

Performing elemental microanalysis with high accuracy and high precision by scanning electron microscopy/silicon drift detector energy-dispersive X-ray spectrometry (SEM/SDD-EDS)

Discussion

Member takes

Implication

Key Points

Cite This Study

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