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July 1, 2002Applied Physics Letters

Atomic oxygen surface loss coefficient measurements in a capacitive/inductive radio-frequency plasma

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Authors

SGSergi GomezQueen's University BelfastPSP. G. SteenQueen's University BelfastWGW. G. GrahamUniversity College London

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Gomez et al. (2002) studied this question.

synapsesocial.com/papers/69d84fc8f4e559c61eae3641https://doi.org/10.1063/1.1490630
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