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December 1, 1982Journal of Applied PhysicsOpen Access

Interface structures during solid-phase-epitaxial growth in ion implanted semiconductors and a crystallization model

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JNJ. NarayanNorth Carolina State University

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J. Narayan (1982) studied this question.

synapsesocial.com/papers/69da24e8ba6014a02e8360d3https://doi.org/10.1063/1.330457
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Also Consider

Synapse has enriched 4 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Solid-Phase-Epitaxial Growth in Ion-Implanted Silicon1982 · 67 citations
  2. 2Formation of metastable supersaturated solid solutions in ion implanted silicon during solid phase crystallization1982 · 59 citations
  3. 3A comparative study of laser and thermal annealing of boron-implanted silicon1978 · 84 citations
  4. 4Atomic modelling of homogeneous nucleation of dislocations from condensation of point defects in silicon1981 · 104 citations