Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process

Lead zirconate titanate (PZT) films 60 μm in thickness have been fabricated using a new sol gel based process. PZT powders are dispersed in a sol gel matrix to form a 0–3 ceramic/ceramic composite. The dielectric properties of these films have been studied as a function of powder concentration, frequency, and temperature. The characteristic Curie point is observed at 420 °C. The ferroelectric behavior measured in terms of the remanant polarization (Pr=35 μC/cm2) and coercive field (Ec=20 kV/cm) was an improvement over values quoted for thin PZT films but lower than that of bulk ceramic. The piezoelectric properties d33 (325 pC/N) and d31 (−80 pC/N) were comparable with those of the bulk ceramic.