Atomic Layer Deposition of Molybdenum Carbide and Substrate-dependent Reduction to Metallic Molybdenum

Kwangyong An; Kieran G. Lawford; Bonwook Gu; Aravind H. Patil; Aaron D. Rogers; Seán T. Barry; Han-Bo-Ram Lee

doi:10.1039/d6tc00454g

January 1, 2026Journal of Materials Chemistry C

Atomic Layer Deposition of Molybdenum Carbide and Substrate-dependent Reduction to Metallic Molybdenum

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Key Points

This research aims to explore the process of atomic layer deposition of molybdenum carbide and its subsequent reduction to metallic molybdenum.
Utilized atomic layer deposition to create molybdenum carbide thin films.
Investigated different substrate materials to assess reduction efficiency.
Analyzed the properties of the resulting metallic molybdenum.
Successfully deposited uniform layers of molybdenum carbide.
Demonstrated effective reduction to metallic molybdenum on specific substrates.
Highlighted substrate influence on the reduction process.

Implication

Research demonstrates the reduction of molybdenum carbide to metallic form using atomic layer deposition on various substrates, indicating its potential in electronics.

Abstract

Atomic layer deposition (ALD) is an essential technique for depositing thin films with uniform thickness on 3D nanostructures, and it is actively being investigated for applications in metal interconnects. In...

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Cite This Study

An et al. (2026) studied this question.

synapsesocial.com/papers/69df2c62e4eeef8a2a6b1833 https://doi.org/10.1039/d6tc00454g

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Atomic Layer Deposition of Molybdenum Carbide and Substrate-dependent Reduction to Metallic Molybdenum

Key Points

Implication

Abstract

Discussion

Cite This Study

Atomic Layer Deposition of Molybdenum Carbide and Substrate-dependent Reduction to Metallic Molybdenum

Key Points

Implication

Abstract

Discussion

Cite This Study

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